{"created":"2023-05-15T16:47:14.348178+00:00","id":23825,"links":{},"metadata":{"_buckets":{"deposit":"1f00c01f-1025-4c8d-a94c-30cffddb1a8c"},"_deposit":{"created_by":2,"id":"23825","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"23825"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00023825","sets":["18:105:117:1675"]},"author_link":["100537","100536","100535"],"item_3_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Images of Electron-Acoustic Microscopy"}]},"item_3_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001-03-28","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"25","bibliographicPageStart":"21","bibliographicVolumeNumber":"64","bibliographic_titles":[{"bibliographic_title":"長崎大学教育学部紀要. 自然科学"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"電子線超音波顕微鏡(EAM)を用いて, 試料にバイポーラトランジスタを中心にMOS (metal-oxide-semiconductor)-LSIなどを用いて半導体素子の非破壊・内部観察を行ってきた。従来から, 走査形電子顕微鏡(SEM)像とEAM像(EAI)とを比較した報告は多い。しかし, それら報告は画面全体でSEM像とは異なる像としたものである。我々はEAM観察を行うに当たって, この問題について当初から重要な課題として取り組んできた。今回, MOS-LSIのTEGを試料に用いて, SEM像とEAM像とが同一画面内で部分的に異なる観察写真を得ることに成功した。観察写真から同一画面内でBEIとEBIC像, およびEAIについて同一位置の10カ所に番号をつけ, 3種類の像の信号強度が同じ位置と, 異なる強度を持つ位置とを明示した。選択した10カ所について信号強度を第1表に示し比較している。実験の結果, (A)一画面内で同一場所でBEI, EBIC像, EAIはそれぞれ異なった情報を持っていること。(B)BEI, EBIC像, EAIの3種類の像観察を併用する事でより多くの非破壊・内部情報が得られることが分かった。","subitem_description_type":"Abstract"},{"subitem_description":"We have given the nondestructive internal observation of semiconductor devices to the specimens using bipolar transistors and MOS (metal-oxide-semiconductor)-LSI by an electron acoustic microscopy (EAM). In the previous reports, the SEM microphotograph images and EAM image (EAI), and there are many comparative reports. But those reports, those images are differ as a whole the screen area. In this time, we use TEG of MOS-LSI as a specimen and succeeded in shooting the photograph that an EAM image differs partially in the same screen area from a SEM images. We obtained the position where 3-kind images (BEI, EBIC image and EAI) have the signal intensity different from the 3 images at the same position where indicated the number of 10 places of the same positions of the photographs. As a result of our experiment in (A) one flame scan in the same area it understood BEI, EBIC image, EAI that they have each different information.","subitem_description_type":"Abstract"}]},"item_3_description_64":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"長崎大学教育学部紀要. 教育科学. vol.68, p.11-25; 2005@@@長崎大学教育学部紀要. 自然科学. vol.64, p.21-25; 2001","subitem_description_type":"Other"}]},"item_3_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"100537","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Takenoshita, Hiroshi"}]}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11330079","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13451359","subitem_source_identifier_type":"ISSN"}]},"item_3_text_62":{"attribute_name":"sortkey","attribute_value_mlt":[{"subitem_text_value":"P00021-P00025"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"竹野下, 寛"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-24"}],"displaytype":"detail","filename":"KJ00000045808.pdf","filesize":[{"value":"402.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00000045808.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/23825/files/KJ00000045808.pdf"},"version_id":"c136fb1c-fb17-4465-bcf3-447cdcbeac5d"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"電子線音波顕微鏡像","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"電子線音波顕微鏡像"}]},"item_type_id":"3","owner":"2","path":["1675"],"pubdate":{"attribute_name":"公開日","attribute_value":"2007-02-08"},"publish_date":"2007-02-08","publish_status":"0","recid":"23825","relation_version_is_last":true,"title":["電子線音波顕微鏡像"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T00:36:00.132722+00:00"}