{"created":"2023-05-15T16:29:45.614696+00:00","id":633,"links":{},"metadata":{"_buckets":{"deposit":"0dbd4091-f942-4125-bb54-462618fbf61a"},"_deposit":{"created_by":2,"id":"633","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"633"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00000633","sets":["14:21"]},"author_link":["112174","112173","112171","112172","112175","112176","112177","112178"],"item_2_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2019-12-19","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"SE","bibliographicPageStart":"SEEE01","bibliographicVolumeNumber":"59","bibliographic_titles":[{"bibliographic_title":"Japanese Journal of Applied Physics"}]}]},"item_2_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We investigated the possibility of R (Nd or Pr)-Fe-B thick-film magnets applied to MEMS. First, an enhancement in the thickness of the Si oxide layer on a Si substrate enabled us to increase the adhesion force between the Si substrate and Nd-Fe-B film. Then, after depositing a glass buffer layer on the Si substrate to obtain a thicker Si oxide layer, we compared the mechanical characteristics and magnetic properties of both Pr-Fe-B and Nd-Fe-B films. As the thickness of the glass buffer layer increased, the thickness of the Pr-Fe-B film could be enhanced without mechanical destruction. We had difficulty in exceeding the thickness of 100 μm in Nd-Fe-B films. Moreover, the (BH)max value of a 127-μm-Thick Pr-Fe-B film was higher by approximately 30 kJ m-3 than that of a 92-μm-Thick Nd-Fe-B film. The obtained results suggest that a Pr-Fe-B thick-film magnet is more suitable for MEMS applications.","subitem_description_type":"Abstract"}]},"item_2_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Japanese Journal of Applied Physics, 59(SE), art.no.SEEE01; 2020","subitem_description_type":"Other"}]},"item_2_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"The Japan Society of Applied Physics"}]},"item_2_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.7567/1347-4065/ab5534","subitem_relation_type_select":"DOI"}}]},"item_2_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"c 2019 The Japan Society of Applied Physics."}]},"item_2_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"00214922","subitem_source_identifier_type":"ISSN"}]},"item_2_source_id_8":{"attribute_name":"EISSN","attribute_value_mlt":[{"subitem_source_identifier":"13474065","subitem_source_identifier_type":"ISSN"}]},"item_2_text_62":{"attribute_name":"出版者別言語","attribute_value_mlt":[{"subitem_text_value":"応用物理学会"}]},"item_2_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Nakano, Masaki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takeichi, Sho"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yamaguchi, Takashi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takashima, Keisuke"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yamashita, Akihiro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yanai, Takeshi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinshi, Tadahiko"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fukunaga, Hirotoshi"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-25"}],"displaytype":"detail","filename":"JJAP59_SEEE01.pdf","filesize":[{"value":"1.2 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"JJAP59_SEEE01.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/633/files/JJAP59_SEEE01.pdf"},"version_id":"6d6c71a8-3191-4d42-ae34-29287bc4718c"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS"}]},"item_type_id":"2","owner":"2","path":["21"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-12-19"},"publish_date":"2020-12-19","publish_status":"0","recid":"633","relation_version_is_last":true,"title":["Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-15T23:01:30.904358+00:00"}