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PLD-Fabricated Isotropic Pr?Fe?B Film Magnets Deposited on Glass Substrates
http://hdl.handle.net/10069/37575
http://hdl.handle.net/10069/3757547622012-0e5d-4607-a5e8-5dbc4ab292be
名前 / ファイル | ライセンス | アクション |
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TraMag53_7762158.pdf (593.9 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-06-27 | |||||
タイトル | ||||||
タイトル | PLD-Fabricated Isotropic Pr?Fe?B Film Magnets Deposited on Glass Substrates | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Glass substrate | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | micro-electro-mechanical systems (MEMS) | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Pr-Fe-B film magnet | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pulsed laser deposition (PLD) | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Yamashita, Akihiro
× Yamashita, Akihiro× Hirotaki, Keishi× Kurosaki, A.× Yanai, Takeshi× Fukunaga, Hirotoshi× Fujiwara, Ryogen× Shinshi, Tadahiko× Nakano, Masaki |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50~\mu \text{m} were emitted from a target and enabled us to obtain the relatively high deposition rate of 30~\mu \text{m} /h. An approximately 100~\mu \text{m} -thick Pr-Fe-B film with the (BH)-{\text {max}} value of 70 kJ/ \text{m}^{3} could be obtained. After polishing a Pr-Fe-B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate. | |||||
書誌情報 |
IEEE Transactions on Magnetics 巻 53, 号 4, p. 7762158, 発行日 2017-04 |
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出版者 | ||||||
出版者 | IEEE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00189464 | |||||
EISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 19410069 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1109/TMAG.2016.2633362 | |||||
権利 | ||||||
権利情報 | c 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | IEEE Transactions on Magnetics, 53(4) |