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Investigation of Deposition Process of Amorphous Carbon Film
http://hdl.handle.net/10069/9868
http://hdl.handle.net/10069/9868c1e1708c-7f09-4dfb-ab76-30094aa34576
名前 / ファイル | ライセンス | アクション |
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NSND2008_P40.pdf (261.3 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2008-02-12 | |||||
タイトル | ||||||
タイトル | Investigation of Deposition Process of Amorphous Carbon Film | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | amorphous carbon film | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | deposition process | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | hydrogen | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | infrared spectroscopy | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Inayioshi, Takanori
× Inayioshi, Takanori× Shinohara, Masanori× Kawazoe, Taiki× Matsuda, Yoshinobu× Fujiyama, Hiroshi× Nakatani, Tatsuyuki |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The dependence of the deposition process of amorphous carbon films on growth temperatures has been investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). The CH_3 peak of amorphous carbon film was decreased as the growth temperature was increased. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation | |||||
書誌情報 |
Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) p. 89-90, 発行日 2008-01-29 |
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フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.89-90 |