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  1. シンポジウム等 = Lectures and Symposiums
  2. Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

Surface Modification due to Solution Plasma

http://hdl.handle.net/10069/21316
http://hdl.handle.net/10069/21316
6280a1b3-f2f7-4ff6-bf50-981996c41303
名前 / ファイル ライセンス アクション
NSND2009_P15.pdf NSND2009_P15.pdf (383.0 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2009-03-09
タイトル
タイトル Surface Modification due to Solution Plasma
言語
言語 eng
キーワード
主題Scheme Other
主題 solution plasma
キーワード
主題Scheme Other
主題 etching
キーワード
主題Scheme Other
主題 deposition
キーワード
主題Scheme Other
主題 amorphous carbon film
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_5794
資源タイプ conference paper
著者 Shuai, Z.

× Shuai, Z.

WEKO 69012

Shuai, Z.

Search repository
Akaki, K.

× Akaki, K.

WEKO 69013

Akaki, K.

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Shimizu, K.

× Shimizu, K.

WEKO 69014

Shimizu, K.

Search repository
Kotani, K.

× Kotani, K.

WEKO 69015

Kotani, K.

Search repository
Shinohara, M.

× Shinohara, M.

WEKO 69016

Shinohara, M.

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Matsuda, Y.

× Matsuda, Y.

WEKO 69017

Matsuda, Y.

Search repository
Fujiyama, H.

× Fujiyama, H.

WEKO 69018

Fujiyama, H.

Search repository
抄録
内容記述タイプ Abstract
内容記述 We succeeded in the generation of two types of solution plasmas: one was generated in the ultrasonic bubbles by feeding DC power or commercial AC 60Hz power for the etching of silicon substrate. The other plasma was generated by low frequency power for the film deposition inside tubes. Now we are optimizing the plasma generation condition for each application.
内容記述
内容記述タイプ Other
内容記述 ナノダイナミクス国際シンポジウム 平成20年1月47日(木) 於長崎大学
内容記述
内容記述タイプ Other
内容記述 Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2023, Nagasaki University, Nagasaki, Japan, Poster Presentation
書誌情報 p. 40-41, 発行日 2009-01-27
出版者
出版者 Nano-Dynamics Group, Nagasaki University
資源タイプ
内容記述タイプ Other
内容記述 text
関係URI
関連名称 http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html
関係URI
関連名称 http://www.mase.nagasaki-u.ac.jp/nano/nano.html
引用
内容記述タイプ Other
内容記述 Nagasaki Symposium on Nano-Dynamics 2009 (NSND2029), p.40-41; 2009
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