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レーザー誘起蛍光法による反応性スパッタリング中の中性インジウム原子密度計測
http://hdl.handle.net/10069/24430
http://hdl.handle.net/10069/2443013138701-9724-4592-8035-a6f2566623ad
名前 / ファイル | ライセンス | アクション |
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kogaku24_42_09.pdf (620.1 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2010-11-02 | |||||
タイトル | ||||||
タイトル | レーザー誘起蛍光法による反応性スパッタリング中の中性インジウム原子密度計測 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
城戸, 拓也
× 城戸, 拓也× 阿野, 一巳× 白方, 一浩× 松田, 良信 |
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著者別名 | ||||||
姓名 | Kido, Takuya | |||||
著者別名 | ||||||
姓名 | Ano, Kazumi | |||||
著者別名 | ||||||
姓名 | Shirakata, Kazuhiro | |||||
著者別名 | ||||||
姓名 | Matsuda, Yoshinobu | |||||
その他のタイトル | ||||||
その他のタイトル | Measurement of Indium Density in the Reactive Sputtering Using the Laser Induced Fluorescence | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We have investigated the reactive sputtering of Indium-Tin-Oxide(ITO) in a dc glow discharge. Spatial distributions of absolute density of sputtered indium atoms were measured by the laser induced fluorescence spectroscopy. The maximum value of the indium density was 1011cm-3 for the case of pure argon dc discharge at the pressure of 0.2 Torr and the discharge voltage of 800 V. | |||||
書誌情報 |
長崎大学工学部研究報告 en : Reports of the Faculty of Engineering, Nagasaki University 巻 24, 号 42, p. 51-58, 発行日 1994-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02860902 | |||||
EISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 18805574 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00178418 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 長崎大学工学部 | |||||
出版者別言語 | ||||||
Faculty of Engineering, Nagasaki University | ||||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 長崎大学工学部研究報告, 24(42), pp.51-58; 1994 |