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  1. シンポジウム等 = Lectures and Symposiums
  2. Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas

http://hdl.handle.net/10069/21300
http://hdl.handle.net/10069/21300
1a1551c2-3bb7-41b6-b886-e11d292eceb0
名前 / ファイル ライセンス アクション
NSND2009_P31.pdf NSND2009_P31.pdf (558.6 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2009-03-09
タイトル
タイトル CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas
言語
言語 eng
キーワード
主題Scheme Other
主題 DLC
キーワード
主題Scheme Other
主題 Quadrupole magnetron plasmas
キーワード
主題Scheme Other
主題 CVD・PVD Hybrid Process
キーワード
主題Scheme Other
主題 Extra Fine Wire
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_5794
資源タイプ conference paper
著者 Yoshitsune, S.

× Yoshitsune, S.

WEKO 68954

Yoshitsune, S.

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Nishiyama, S.

× Nishiyama, S.

WEKO 68955

Nishiyama, S.

Search repository
Iwamoto, N.

× Iwamoto, N.

WEKO 68956

Iwamoto, N.

Search repository
Tokunaga, Y.

× Tokunaga, Y.

WEKO 68957

Tokunaga, Y.

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Shinohara, M.

× Shinohara, M.

WEKO 68958

Shinohara, M.

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Fujiyama, H.

× Fujiyama, H.

WEKO 68959

Fujiyama, H.

Search repository
抄録
内容記述タイプ Abstract
内容記述 It was investigated that characteristics of DLC thin films deposited to extra fine wire by CH4 gas, Ar gas and CH4/Ar gas mixtures. It was found that the characteristics of films are change depending on mixture rate of the gases.
内容記述
内容記述タイプ Other
内容記述 ナノダイナミクス国際シンポジウム 平成20年1月63日(木) 於長崎大学
内容記述
内容記述タイプ Other
内容記述 Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2039, Nagasaki University, Nagasaki, Japan, Poster Presentation
書誌情報 p. 70-71, 発行日 2009-01-27
出版者
出版者 Nano-Dynamics Group, Nagasaki University
資源タイプ
内容記述タイプ Other
内容記述 text
関係URI
関連名称 http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html
関係URI
関連名称 http://www.mase.nagasaki-u.ac.jp/nano/nano.html
引用
内容記述タイプ Other
内容記述 Nagasaki Symposium on Nano-Dynamics 2009 (NSND2045), p.70-71; 2009
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