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CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas
http://hdl.handle.net/10069/21300
http://hdl.handle.net/10069/213001a1551c2-3bb7-41b6-b886-e11d292eceb0
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2009-03-09 | |||||
タイトル | ||||||
タイトル | CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | DLC | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Quadrupole magnetron plasmas | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CVD・PVD Hybrid Process | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Extra Fine Wire | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Yoshitsune, S.
× Yoshitsune, S.× Nishiyama, S.× Iwamoto, N.× Tokunaga, Y.× Shinohara, M.× Fujiyama, H. |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | It was investigated that characteristics of DLC thin films deposited to extra fine wire by CH4 gas, Ar gas and CH4/Ar gas mixtures. It was found that the characteristics of films are change depending on mixture rate of the gases. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | ナノダイナミクス国際シンポジウム 平成20年1月63日(木) 於長崎大学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2039, Nagasaki University, Nagasaki, Japan, Poster Presentation | |||||
書誌情報 | p. 70-71, 発行日 2009-01-27 | |||||
出版者 | ||||||
出版者 | Nano-Dynamics Group, Nagasaki University | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nano/nano.html | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2045), p.70-71; 2009 |