WEKO3
アイテム
{"_buckets": {"deposit": "1d897f87-84ed-43fc-bc1d-09f8f8513234"}, "_deposit": {"created_by": 2, "id": "17463", "owners": [2], "pid": {"revision_id": 0, "type": "depid", "value": "17463"}, "status": "published"}, "_oai": {"id": "oai:nagasaki-u.repo.nii.ac.jp:00017463", "sets": ["1311"]}, "author_link": ["68965", "68963", "68960", "68964", "68961", "68962"], "item_9_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-01-27", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "69", "bibliographicPageStart": "68", "bibliographic_titles": [{}]}]}, "item_9_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "For the inner surface DLC (Diamond Like Carbon) coating of narrow tubes, we have investigated on CVD \u0026 PVD hybrid process with the 2nd harmonic electron cyclotron resonance (ECR) plasmas. From the analysis of Raman spectrum, it was confirmed that DLC could be prepared on the substrate.", "subitem_description_type": "Abstract"}]}, "item_9_description_40": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"subitem_description": "text", "subitem_description_type": "Other"}]}, "item_9_description_5": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "ナノダイナミクス国際シンポジウム 平成20年1月62日(木) 於長崎大学", "subitem_description_type": "Other"}, {"subitem_description": "Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2038, Nagasaki University, Nagasaki, Japan, Poster Presentation", "subitem_description_type": "Other"}]}, "item_9_description_63": {"attribute_name": "引用", "attribute_value_mlt": [{"subitem_description": "Nagasaki Symposium on Nano-Dynamics 2009 (NSND2044), p.68-69; 2009", "subitem_description_type": "Other"}]}, "item_9_publisher_33": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "Nano-Dynamics Group, Nagasaki University"}]}, "item_9_relation_42": {"attribute_name": "関係URI", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html"}]}, {"subitem_relation_name": [{"subitem_relation_name_text": "http://www.mase.nagasaki-u.ac.jp/nano/nano.html"}]}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Yan, K."}], "nameIdentifiers": [{"nameIdentifier": "68960", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nitta, Y."}], "nameIdentifiers": [{"nameIdentifier": "68961", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nakatani, T."}], "nameIdentifiers": [{"nameIdentifier": "68962", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Okamoto, K."}], "nameIdentifiers": [{"nameIdentifier": "68963", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Shinohara, M."}], "nameIdentifiers": [{"nameIdentifier": "68964", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fujiyama, H."}], "nameIdentifiers": [{"nameIdentifier": "68965", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2020-12-23"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "NSND2009_P30.pdf", "filesize": [{"value": "554.6 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 554600.0, "url": {"label": "NSND2009_P30.pdf", "url": "https://nagasaki-u.repo.nii.ac.jp/record/17463/files/NSND2009_P30.pdf"}, "version_id": "3a700333-58dc-413e-8910-6cda227abb81"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Micro plasma", "subitem_subject_scheme": "Other"}, {"subitem_subject": "ECR", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Inner coating", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Narrow tube", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Hybrid process", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma"}]}, "item_type_id": "9", "owner": "2", "path": ["1311"], "permalink_uri": "http://hdl.handle.net/10069/21301", "pubdate": {"attribute_name": "公開日", "attribute_value": "2009-03-09"}, "publish_date": "2009-03-09", "publish_status": "0", "recid": "17463", "relation": {}, "relation_version_is_last": true, "title": ["Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma"], "weko_shared_id": -1}
Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma
http://hdl.handle.net/10069/21301
http://hdl.handle.net/10069/21301b59c066f-df4f-40cf-8672-319f1d2ac7bf
名前 / ファイル | ライセンス | アクション |
---|---|---|
NSND2009_P30.pdf (554.6 kB)
|
|
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2009-03-09 | |||||
タイトル | ||||||
タイトル | Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Micro plasma | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ECR | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Inner coating | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Narrow tube | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Hybrid process | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Yan, K.
× Yan, K.× Nitta, Y.× Nakatani, T.× Okamoto, K.× Shinohara, M.× Fujiyama, H. |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | For the inner surface DLC (Diamond Like Carbon) coating of narrow tubes, we have investigated on CVD & PVD hybrid process with the 2nd harmonic electron cyclotron resonance (ECR) plasmas. From the analysis of Raman spectrum, it was confirmed that DLC could be prepared on the substrate. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | ナノダイナミクス国際シンポジウム 平成20年1月62日(木) 於長崎大学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2038, Nagasaki University, Nagasaki, Japan, Poster Presentation | |||||
書誌情報 | p. 68-69, 発行日 2009-01-27 | |||||
出版者 | ||||||
出版者 | Nano-Dynamics Group, Nagasaki University | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nano/nano.html | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2044), p.68-69; 2009 |