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LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD
http://hdl.handle.net/10069/9854
http://hdl.handle.net/10069/985444c717b3-fd4c-42fe-922b-155e2d2d99ee
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2008-02-12 | |||||
タイトル | ||||||
タイトル | LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | microplasma | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 2^<nd> harmonic ECR | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | low pressure plasma generation | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Yukishige, A
× Yukishige, A× Nakatani, T.× Shinohara, M.× Fujiyama, H. |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Microsize plasma sources have not been developed for the condition of low-pressure range less than 0.1Torr in the present technology. In this article we investigate a 2.45GHz microwave discharge operated at the ECR and the 2^<nd> harmonic ECR, by mirror magnetic field. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation | |||||
書誌情報 |
Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) p. 57-58, 発行日 2008-01-29 |
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フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.57-58 |