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  1. シンポジウム等 = Lectures and Symposiums
  2. Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)

LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD

http://hdl.handle.net/10069/9854
http://hdl.handle.net/10069/9854
44c717b3-fd4c-42fe-922b-155e2d2d99ee
名前 / ファイル ライセンス アクション
NSND2008_P24.pdf NSND2008_P24.pdf (276.0 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2008-02-12
タイトル
タイトル LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD
言語
言語 eng
キーワード
主題Scheme Other
主題 microplasma
キーワード
主題Scheme Other
主題 2^<nd> harmonic ECR
キーワード
主題Scheme Other
主題 low pressure plasma generation
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_5794
資源タイプ conference paper
著者 Yukishige, A

× Yukishige, A

WEKO 95616

Yukishige, A

Search repository
Nakatani, T.

× Nakatani, T.

WEKO 95617

Nakatani, T.

Search repository
Shinohara, M.

× Shinohara, M.

WEKO 95618

Shinohara, M.

Search repository
Fujiyama, H.

× Fujiyama, H.

WEKO 95619

Fujiyama, H.

Search repository
抄録
内容記述タイプ Abstract
内容記述 Microsize plasma sources have not been developed for the condition of low-pressure range less than 0.1Torr in the present technology. In this article we investigate a 2.45GHz microwave discharge operated at the ECR and the 2^<nd> harmonic ECR, by mirror magnetic field.
内容記述
内容記述タイプ Other
内容記述 Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation
書誌情報 Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)

p. 57-58, 発行日 2008-01-29
フォーマット
内容記述タイプ Other
内容記述 application/pdf
資源タイプ
内容記述タイプ Other
内容記述 text
引用
内容記述タイプ Other
内容記述 Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.57-58
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